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Rensselaer Polytechnic Institute, Troy, NY, USA
van de Sanden , M. C. M.
(Speaker)
Plasma & Materials Processing
Activity
:
Talk or presentation types
›
Contributed talk
›
Scientific
Description
Plasma-surface interaction: In situ and real time studies during plasma processing of materials
Period
31 May 2006
Event title
Rensselaer Polytechnic Institute, Troy, NY, USA
Event type
Conference