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Overview of approaches for achieving area-selective ALD
Mackus, A. J. M.
(Invited speaker)
Plasma & Materials Processing
Selective atomic-scale processing for nanoelectronics
Activity
:
Talk or presentation types
›
Invited talk
›
Scientific
Period
29 Apr 2018
→
1 May 2018
Event title
3rd Area Selective Deposition Workshop
Event type
Workshop
Location
Rayleigh, United States
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Degree of Recognition
International