New Process Concepts Towards Area-Selective Atomic Layer Deposition and Atomic Layer Etching of Zinc Oxide
- Mameli, A. (Member)
- Verheijen, M. A. (Member)
- B. Karasulu (Member)
- Mackus, A. J. M. (Member)
- Kessels, W. M. M. (Member)
- F. Roozeboom (Speaker)
Activity: Talk or presentation types › Contributed talk › Scientific