New Process Concepts Towards Area-Selective Atomic Layer Deposition and Atomic Layer Etching of Zinc Oxide

A. Mameli (Member), Verheijen, M. A. (Member), Karasulu, B. (Member), Mackus, A. J. M. (Member), Kessels, W. M. M. (Member), Roozeboom, F. (Speaker)

Activity: Talk or presentation typesContributed talkScientific

Period30 Sep 2018 - 4 Oct 2018
Held at234th ECS Meeting / AiMES
Event typeOther
LocationCancun, Mexico
Degree of RecognitionInternational