New Process Concepts Towards Area-Selective Atomic Layer Deposition and Atomic Layer Etching of Zinc Oxide

A. Mameli (Member), Verheijen, M. A. (Member), Karasulu, B. (Member), Mackus, A. J. M. (Member), Kessels, W. M. M. (Member), Roozeboom, F. (Speaker)

Activity: Talk or presentation typesContributed talkScientific

Period30 Sep 20184 Oct 2018
Event title234th ECS Meeting / AiMES
Event typeOther
LocationCancun, Mexico
Degree of RecognitionInternational