Netherlands MicroNanoConference '09, November 5-6, 2009, Delft, the Netherlands

Activity: Talk or presentation typesContributed talkScientific

Description

Plasma-assisted ALD : from basic understanding to successful commercialization
Period1 Nov 2009
Event titleNetherlands MicroNanoConference '09, November 5-6, 2009, Delft, the Netherlands
Event typeConference
LocationDelft, Netherlands