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Institut für Energieforschung – Plasmaphysik, Jülich, Germany
van de Sanden , M. C. M.
(Speaker)
Plasma & Materials Processing
Activity
:
Talk or presentation types
›
Contributed talk
›
Scientific
Description
Plasma-surface interaction during the growth of silicon and carbon thin films: in situ plasma and surface studies
Period
23 Jan 2009
Event title
Institut für Energieforschung – Plasmaphysik, Jülich, Germany
Event type
Conference