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In-line EUV beam monitoring using microwaves
F.M.J.H. van de Wetering (Contributor)
Coherence and Quantum Technology
Activity
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Scientific
Period
7 Mar 2017
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8 Mar 2017
Event title
29th Symposium on Plasma Physics and Radiation Technology
Event type
Conference
Conference number
29
Organisers
DIFFER Dutch Institute for Fundamental Energy Research,
Eindhoven University of Technology
Location
Lunteren, Netherlands
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Degree of Recognition
National