In-line EUV beam monitoring using microwaves

  • F.M.J.H. van de Wetering (Contributor)

Activity: Other activity typesOtherScientific

Period7 Mar 20178 Mar 2017
Event title29th Symposium on Plasma Physics and Radiation Technology
Event typeConference
Conference number29
OrganisersDIFFER Dutch Institute for Fundamental Energy Research, Eindhoven University of Technology
LocationLunteren, NetherlandsShow on map
Degree of RecognitionNational