High-Voltage Actuation System for Future Generation Lithography Systems: Power Amplifier

Settels, S. (Speaker)

Activity: Talk or presentation typesPoster presentationScientific

Description

Poster presentation at the Gala Dinner for the Martin van den Brink Award organised by the Dutch Society for Precision Engineering (DSPE).
Period26 May 2016
Held atGala Dinner Martin van den Brink Award, May 26, 2016, Eindhoven, The Netherlands
Event typeOther
LocationEindhoven, Netherlands

Keywords

  • High Voltage
  • High Precision
  • Mechatronic Systems