Gordon Research Conference "Chemical Reactions at Surfaces", February 8-13, 2009, Ventura, CA, USA

Activity: Talk or presentation typesContributed talkScientific

Description

In situ studies of surface reactions during atomic layer deposition of Al2O3 and Pt films
Period1 Feb 2009
Event titleGordon Research Conference "Chemical Reactions at Surfaces", February 8-13, 2009, Ventura, CA, USA
Event typeConference
LocationVentura, CA, United States