Gordon Research Conference "Chemical Reactions at Surfaces", February 8-13, 2009, Ventura, CA, USA

Activity: Talk or presentation types › Contributed talk › Scientific

Description

In situ studies of surface reactions during atomic layer deposition of Al2O3 and Pt films
Period1 Feb 2009
Event titleGordon Research Conference: Chemical Reactions at Surfaces 2009
Event typeConference
LocationVentura, United States, CaliforniaShow on map

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