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E-MRS, Strasbourg, France
van de Sanden , M. C. M.
(Speaker)
Plasma & Materials Processing
Activity
:
Talk or presentation types
›
Contributed talk
›
Scientific
Description
Plasma-surface interaction during the growth of silica-like films: understanding the growth mechanism
Period
8 Jun 2009
Event title
E-MRS, Strasbourg, France
Event type
Conference