Atomic Layer Etching of ZnO on 2D and 3D substrates, using acetylacetone and O2 plasma

A. Mameli (Member), Verheijen, M. A. (Member), B. Karasulu (Member), Mackus, A. J. M. (Member), Kessels, W. M. M. (Member), Roozeboom, F. (Invited speaker)

Activity: Talk or presentation typesInvited talkScientific

Period24 Jul 201828 Jul 2018
Event titleJoint International Conference on ICMAP: null
Event typeConference
LocationKorea