Atomic Layer Etching of ZnO on 2D and 3D substrates, using acetylacetone and O2 plasma
- Mameli, A. (Member)
- Verheijen, M. A. (Member)
- B. Karasulu (Member)
- Mackus, A. J. M. (Member)
- Kessels, W. M. M. (Member)
- F. Roozeboom (Invited speaker)
Activity: Talk or presentation types › Invited talk › Scientific