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Applied Materials, Santa Clara, CA, USA
Kessels, W. M. M.
(Invited speaker)
Plasma & Materials Processing
Atomic scale processing
Activity
:
Talk or presentation types
›
Invited talk
›
Scientific
Description
Opportunities for (plasma-assisted) ALD for semiconductors and non-semiconductors
Period
1 Jul 2010
Event title
Applied Materials, Santa Clara, CA, USA
Event type
Conference