Amorphous and Polycrystalline Thin-Film Silicon Science and Technology 2009, April 13-17, 2009, San Francisco, CA, USA

Activity: Talk or presentation typesContributed talkScientific

Description

Defect evolution kinetics in a-Si:H thin films during hydrogen atom irradiation studied by EW-CRDS
Period14 Apr 2009
Event titleAmorphous and Polycrystalline Thin-Film Silicon Science and Technology 2009, April 13-17, 2009, San Francisco, CA, USA
Event typeConference
LocationSan Francisco, CA, United States