Description
Invited Lecture at Technical University of Denmark, Department of Electrical EngineeringUltra-high precision systems are encountered in high-tech industrial applications including semiconductor lithography equipment, pick-and-place machines for the manufacturing of electronic components, microsurgery equipment, MRI equipment and calibration devices in electron microscopes. The performance of such systems crucially depends on the quality of the actuation and power electronics components that are responsible for the positioning accuracy, speed and the required force densities. In all such applications, actuators are regulated by dedicated control strategies, so as to achieve guarantees on stability, robustness, reliability and flexibility of the system. For years, these demands have stimulated research on advanced control of high-precision electromagnetic actuation systems. Today, researchers struggle to find systematic approaches to design high-precision actuation systems that combine hundreds of electrical drives, thousands of sensors, operate at nanometer accuracy (1-5nm) with response times that are negligible in the microsecond range, achieve velocities close to 5 m/sec and acceleration levels reaching over 100 m/s2.. At the same time, these systems need to be energy efficient and keep thermal stabilities within milli-Kelvin ranges. The lecture will cover a few research lines in the design and development of advanced electromagnetic and power electronics energy converters, which are mainly applied in high-precision, linear, spherical and planar motion systems. Many of the researched high-tech actuation systems are unique in the world and, therefore, realization and experimental validation are important for the research. The number of unique and world-class systems, which have been modelled, designed, experimentally validated, will be presented.
| Period | 26 Jan 2015 |
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| Held at | Technical University of Denmark, Denmark |