9th International Conference on Atomic Layer Deposition (ALD 2009), Monterey, USA

Activity: Talk or presentation types › Invited talk › Scientific

Description

Reaction mechanisms during remote plasma ALD for low temperature materials and energy-related applications

Period	20 Jul 2009
Event title	9th International Conference on Atomic Layer Deposition (ALD 2009)
Event type	Conference
Conference number	9
Location	Monterey, California, United StatesShow on map