9th International Conference on Atomic Layer Deposition (ALD 2009), Monterey, USA

Activity: Talk or presentation typesInvited talkScientific

Description

Reaction mechanisms during remote plasma ALD for low temperature materials and energy-related applications
Period20 Jul 2009
Event title9th International Conference on Atomic Layer Deposition (ALD 2009)
Event typeConference
Conference number9
LocationMonterey, California, United States