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47th Annual SVC Technical Conference, Dallas, USA
van de Sanden , M. C. M.
(Speaker)
Plasma & Materials Processing
Activity
:
Talk or presentation types
›
Contributed talk
›
Scientific
Description
PECVD of thin films: the study of plasma-surface interaction by means of in situ plasma and film diagnostics
Period
30 Apr 2004
Event title
47th Annual SVC Technical Conference, Dallas, USA
Event type
Conference