29th International Conference on Phenomena in Ionized Gases (ICPIG 2009), July 12-17, 2009, Cancún, México

Activity: Talk or presentation typesContributed talkScientific

Description

Plasma-assisted atomic layer deposition of ultrathin oxide and metal films
Period12 Jul 2009
Event title29th International Conference on Phenomena in Ionized Gases (ICPIG 2009), July 12-17, 2009, Cancún, México
Event typeConference
LocationCancún, Mexico