16th International Colloquium on Plasma Processes, Toulouse, France

Activity: Talk or presentation typesContributed talkScientific

Description

Plasma assisted atomic layer deposition for 3D integration and other applications
Period7 Jun 2007
Event title16th International Colloquium on Plasma Processes (CIP 2007), June 7, 2007, Paris, France
Event typeConference
LocationParis, France